• Self Contained unit complete.
• Floor-mounted floor unit on castor for easy moving.
• Fault alarm indication for water level, compressor overload, over temperature, reverse motor pump, low flow and etc.
• Brazed stainless steel heat exchanger ensure no clogging due to accumulated dirt.
• Temperature range of 5~40 degree celcius with indication resolution of 0.1 degree celcius.
• Digital indication and set point.
• Complete with alarm for safety feature and easy to see Warning indicator.
• Customizeable to tailor to your application and specification.

Benchtop Emission Spectrometers       

PolySpek series

Metalscan 2500 series

Portable Emission Spectrometers

Metalscan ’A’ series

 We are authorized by Shimadzu Corporation in Japan as the Service Center for Turbo Molecular pumps in Asia Pacific region.

 Shimadzu Magnetically Levitated Turbo Molecular Pumps 

 Shimadzu’s unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 10¹¹ for N₂; and for some versions extends the forevacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

SICERA™ Cryopump lines are ideally designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies.

SICERA™ Cryopump

At only 0.9 kW per pump, and using SHI proprietary inverter technology, SICERA redefines the meaning of “low energy consumption” by reducing customer energy costs 20-30%.  The breakthrough multi-pump system allows up to six (6) 8 in. (200 mm) pumps to run on a single compressor without performance degradation. 

 SICERA is available in 8 in. and 12 in. (300 mm) sizes, with both models having fully-automated regeneration cycles to maximize production uptime.  The resulting savings and increased production efficiency make them ideal for high-volume semiconductor wafer, flat panel display and related processing.

 Apart from the cryopump(s), the complete SICERA system includes a compressor and a remote controller.  All have been thoroughly tested to withstand the most demanding vacuum applications, thereby allowing a maximum of ten cryopumps and two compressors to operate simultaneously through a single controller.  By continuously controlling both the cryocooler and the compressor operating frequencies, SHI Cryogenics Group is able to offer a reliable cryopump system with significant energy savings, as well as excellent temperature and vacuum stability.