Turbo Molecular Pump Service & Repair center

 We are authorized by Shimadzu Corporation in Japan as the Service Center for Turbo Molecular pumps in Asia Pacific region.

 Shimadzu Magnetically Levitated Turbo Molecular Pumps 

 Shimadzu’s unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the forevacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.