SICERA™ Cryopump lines are ideally designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies.

SICERA™ Cryopump

At only 0.9 kW per pump, and using SHI proprietary inverter technology, SICERA redefines the meaning of “low energy consumption” by reducing customer energy costs 20-30%.  The breakthrough multi-pump system allows up to six (6) 8 in. (200 mm) pumps to run on a single compressor without performance degradation. 

 SICERA is available in 8 in. and 12 in. (300 mm) sizes, with both models having fully-automated regeneration cycles to maximize production uptime.  The resulting savings and increased production efficiency make them ideal for high-volume semiconductor wafer, flat panel display and related processing.

 Apart from the cryopump(s), the complete SICERA system includes a compressor and a remote controller.  All have been thoroughly tested to withstand the most demanding vacuum applications, thereby allowing a maximum of ten cryopumps and two compressors to operate simultaneously through a single controller.  By continuously controlling both the cryocooler and the compressor operating frequencies, SHI Cryogenics Group is able to offer a reliable cryopump system with significant energy savings, as well as excellent temperature and vacuum stability.